Study of the effect of thermal treatment on morphology and chemical composition of silicon-on-insulator
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2016Access:
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Prabhava S. N. Barimar, Catherine M. Doyle, Borislav Naydenov, and John J. Boland, Study of the effect of thermal treatment on morphology and chemical composition of silicon-on-insulator, Journal of Vacuum Science & Technology B, 34, 2016, 041806-Download Item:
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Science Foundation Ireland (SFI)
12/IA/1482
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http://people.tcd.ie/barimarphttp://people.tcd.ie/jboland
http://people.tcd.ie/naydenob
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Journal of Vacuum Science & Technology B34
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Nanoscience & Materials , AFM phase analysis , Dewetting , Oxide desorption , SCANNING TUNNELLING MICROSCOPY (STM) , SILICON DIOXIDE FILMS , SILICON-ON-INSULATOR , STM , Scanning Tunneling Spectroscopy (STS) , Silicon carbide , Thermal treatment , Ultra high vacuumDOI:
http://dx.doi.org/10.1116/1.4955067Metadata
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