Crystallographic Characterisation of Ultra-Thin, or Amorphous Transparent Conducting Oxides ? The Case for Raman Spectroscopy
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2020Access:
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Igor Shvets, AITKAZY KAISHA, AINUR ZHUSSUPBEKOVA, ARDAK AINABAYEV, David Caffrey, 'Crystallographic Characterisation of Ultra-Thin, or Amorphous Transparent Conducting Oxides ? The Case for Raman Spectroscopy', 2020, Materials;, 13;, 267;Download Item:
Abstract:
The electronic and optical properties of transparent conducting oxides (TCOs) are closely linked to their crystallographic structure on a macroscopic (grain sizes) and microscopic (bond structure) level. With the increasing drive towards using reduced film thicknesses in devices and growing interest in amorphous TCOs such as n-type InGaZnO4 (IGZO), ZnSnO3 (ZTO), p-type CuxCrO2, or ZnRh2O4, the task of gaining in-depth knowledge on their crystal structure by conventional X-ray diffraction-based measurements are becoming increasingly difficult. We demonstrate the use of a focal shift based background subtraction technique for Raman spectroscopy specifically developed for the case of transparent thin films on amorphous substrates. Using this technique we demonstrate, for a variety of TCOs CuO, a-ZTO, ZnO:Al), how changes in local vibrational modes reflect changes in the composition of the TCO and consequently their electronic properties.
Sponsor
Grant Number
Science Foundation Ireland
12/IA/1264
Science Foundation Ireland
SFI/12/RC/2278
Ministry of Education and Science, Republic of Kazakhstan
AP05134861
Ministry of Education and Science, Republic of Kazakhstan
0115PK03029
Author's Homepage:
http://people.tcd.ie/caffredahttp://people.tcd.ie/ivchvets
http://people.tcd.ie/ainabaya
http://people.tcd.ie/zhussupa
http://people.tcd.ie/kaishaa
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Materials;13;
267;
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transparent conducting oxide, TCO, Raman spectroscopy, amorphous oxide, oxide electronics, background subtractionDOI:
https://doi.org/10.3390/ma13020267Metadata
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