Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen
Citation:
Park, K.K., Lee, H,J.,Yaralioglu, G.G., Ergun, A.S., Oralkan, O., Kupnik, M., Quate, C.F., Khuri-Yakub, B.T., Braun, T., Ramseyer, J.P., Lang, H.P., Hegner, M., Gerber, Ch., Gimzewski, J.K., Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen, Applied Physics Letters, 91, 2007, 094102Download Item:
Abstract:
The authors present the prototype of a chemical sensor using a capacitive micromachined ultrasonic
transducer array. Each element in the array consists of a large number of resonating membranes
connected in parallel. A five-channel oscillator circuit operates at the resonant frequency around
6 MHz in this prototype. The surface of the elements in the array is coated by polymers such as
polyallylamine hydrochloride, polyethylene glycol, and polyvinyl alcohol to detect different
chemicals. By measuring shift in oscillation frequencies due to the mass-loading effect, analytes,
e.g., water and isopropanol, with concentrations around 20 ppbv parts per 109 by volume range
can be detected.
Author's Homepage:
http://people.tcd.ie/hegnermDescription:
PUBLISHED
Author: HEGNER, MARTIN
Type of material:
Journal ArticleCollections
Series/Report no:
Applied Physics Letters;91;
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