Nanorheology of squeezed polymer films
File Type:
PDFItem Type:
Conference PaperDate:
2003Citation:
O'Connell, B., Cross, G.L.W., Pethica, J.B. and Oliver, W. `Nanorheology of squeezed polymer films? in Proceedings of Third IEEE Conference on Nanotechnology, 12-14 Aug., 2003, 2, IEEE, pp 793-796Download Item:
nanorheology.pdf (published (publisher copy) peer-reviewed) 366bytes
Abstract:
We present investigations of submicrometer quasi-two dimensional flow mechanics of squeezed thin polymer films in the context of nanoimprint lithography. The polymer films were indented by patterned spherical indenters above and below the glass transition region in a temperature controlled nanoindenter. Static and dynamical mechanical characteristics of the contact were monitored during the printing process. We demonstrate the relation of substrate deformation in the cold embossing technique and residual stress relaxation during hot embossing to the overall pattern transfer fidelity during isothermal stamping.
Sponsor
Grant Number
Science Foundation Ireland
Author's Homepage:
http://people.tcd.ie/crossgDescription:
PUBLISHEDPublisher:
IEEEType of material:
Conference PaperCollections:
Series/Report no:
2Availability:
Full text availableKeywords:
cold embossing method, dynamical mechanical characteristics, glass transition, hot embossing, isothermal stamping, nanoimprint lithography, nanoindenter, nanorheology, pattern transfer fidelity, patterned spherical indenters, residual stress relaxation, squeezed thin polymer films, statical mechanical characteristics, submicrometer, quasi two dimensional flow mechanics, substrate deformationLicences: