Browsing Electronic & Electrical Eng (Scholarly Publications) by Subject "chemical vapour deposition"
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Raman and Fourier transform infrared study of substitutional carbon incorporation in rapid thermal chemical vapor deposited Si 1-x-yGexCy on (1 0 0) Si
(2010)We report on a detailed study of the dependence of the vibrational modes in rapid thermal chemical vapor deposited Si1?x?yGexCy films on the substitutional carbon concentration. Si1?x?yGexCy films were investigated using ...