Rapid Thermal Oxidation of Strained-Ge Layers

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S. Das, S. Chakraborty, S. Bhattacharya, M. Bain, J. McCarthy, B.M. Armstrong, H.S. Gamble, G.K. Dalapati, S.K. Samanta, T. Perova, R.A. Moore and C.K. Maiti, Rapid Thermal Oxidation of Strained-Ge Layers, IEEE 24th International Conference on Microelectronics (MIEL-2004), NIS, Serbia and Montenegro, 16-19 May, 24, 2, 2004, 479, 482

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NIS, Serbia and Montenegro
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Author's Homepage: http://people.tcd.ie/rmoore

Author: MOORE, ALAN

Author: PEROVA, TANIA

Other Titles: IEEE 24th International Conference on Microelectronics (MIEL-2004)
Type of material: Conference Paper