• Study of the effect of thermal treatment on morphology and chemical composition of silicon-on-insulator

    Thumbnail Image

    Files

    TARA_Study of the effect of thermal treatment on morphology and chemical composition of silicon-on-insulaton.pdf (13.42 MB)

    Date

    2016

    Authors

    Journal Title

    Journal ISSN

    Volume Title

    Publisher

    Access

    openAccess

    Embargo end date

    Citation

    Prabhava S. N. Barimar, Catherine M. Doyle, Borislav Naydenov, and John J. Boland, Study of the effect of thermal treatment on morphology and chemical composition of silicon-on-insulator, Journal of Vacuum Science & Technology B, 34, 2016, 041806-

    Abstract

    Description

    PUBLISHED

    URI

    http://hdl.handle.net/2262/77690

    Collections

    Chemistry (Scholarly Publications)
    Load more

    Endorsement

    Review

    Supplemented By

    Referenced By

    Keywords

    Sponsor: Science Foundation Ireland (SFI)
    Grant Number: 12/IA/1482

    Author's Homepage: http://people.tcd.ie/barimarp

    Author: BARIMAR, PRABHAVA SAI NARAYANA

    Author: NAYDENOV, BORISLAV

    Author: BOLAND, JOHN

    Type of material: Journal Article