Nanomechanical forming studies of thin polymer films

Abstract

Nanoimprint is a technique that involves mechanical patterning using a rigid patterned stamp on a deformable thin film to produce nanostructures. It is also a technique that is the focus of much research because of the benefits it brings over other nanofabricarion methods. It is a planar process potentially capable of producing high resolution features at a high throughput and low cost since it's inception in 1995 reproducing features smaller than 25nm [1] and soon afterwards, features below 10nm in 1997 [2].