• Measurement of the lithographic point-spread function of a focused helium ion beam in negative-tone PMMA and fullerene resists on ultrathin membranes

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    2026

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    R. O'Meara and V. Dhyani and B.R. Tak and A. McClelland and G. Dawson and C. Storey and A.P.G. Robinson and B. Holst and R.G. Hobbs, Measurement of the lithographic point-spread function of a focused helium ion beam in negative-tone PMMA and fullerene resists on ultrathin membranes, Microelectronic Engineering, 302, 2026, 112405

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    https://hdl.handle.net/2262/112384

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    Chemistry (Scholarly Publications)

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    Sponsor: Royal Society
    Grant Number: 17/RS-EA/3466

    Sponsor: Science Foundation Ireland (SFI)
    Grant Number: 15/RS-URF/3306

    Sponsor: Science Foundation Ireland (SFI)
    Grant Number: 12/RC/2278_2

    Author's Homepage: http://people.tcd.ie/hobbsr

    Author: Hobbs, Richard

    Type of material: Journal Article