Rapid and Reliable Calibration of Laser Beam Deflection System for Microcantilever-Based Sensor Setups
Citation:
Rohit Mishra, Wilfried Grange, and Martin Hegner, Rapid and Reliable Calibration of Laser Beam Deflection System for Microcantilever-Based Sensor Setups, Journal of Sensors, 2012, 617386, 2012, 6Download Item:
Abstract:
Cantilever array-based sensor devices widely utilise the laser-based optical deflection method for measuring static cantilever deflections mostly with home-built devices with individual geometries. In contrast to scanning probe microscopes, cantilever array devices have no additional positioning device like a piezo stage. As the cantilevers are used in more and more sensitive measurements, it is important to have a simple, rapid, and reliable calibration relating the deflection of the cantilever to the change in position measured by the position-sensitive detector. We present here a simple method for calibrating such systems utilising commercially available AFM cantilevers and the equipartition theorem.
Sponsor
Grant Number
Science Foundation Ireland (SFI)
09IN.1B2623
Science Foundation Ireland (SFI)
00/PI.1/C02
Author's Homepage:
http://people.tcd.ie/hegnermDescription:
PUBLISHED
Author: HEGNER, MARTIN; MISHRA, ROHIT
Type of material:
Journal ArticleCollections
Series/Report no:
Journal of Sensors2012
617386
Availability:
Full text availableKeywords:
Optics, Cantilever array-based sensorsSubject (TCD):
Nanoscience & MaterialsDOI:
http://dx.doi.org/10.1155/2012/617386Metadata
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