Browsing Physics (Scholarly Publications) by Author "PETHICA, JOHN"
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A direct-write, resistless hard mask for rapid nanoscale patterning of diamond
CROSS, GRAHAM; PETHICA, JOHN (2011)We introduce a simple, resist-free dry etch mask for producing patterns in diamond, both bulk and thin deposited films. Direct gallium ion beam exposure of the native diamond surface to doses as low as 1016 cm-2 forms a ...