Study of the effect of thermal treatment on morphology and chemical composition of silicon-on-insulator - BARIMAR, PRABHAVA SAI NARAYANA; NAYDENOV, BORISLAV; BOLAND, JOHN (My University, 2016)
PUBLISHED
Keywords: Nanoscience & Materials; AFM phase analysis; Dewetting; Oxide desorption; SCANNING TUNNELLING MICROSCOPY (STM); SILICON DIOXIDE FILMS; SILICON-ON-INSULATOR; STM; Scanning Tunneling Spectroscopy (STS); Silicon carbide; Thermal treatment; Ultra high vacuum