Measurement of the lithographic point-spread function of a focused helium ion beam in negative-tone PMMA and fullerene resists on ultrathin membranes - Hobbs, Richard (My University, 2026)
PUBLISHED
Keywords: Nanoscience & Materials; Focused ion beam; LITHOGRAPHY; NANOSTRUCTURES; Nanofabrication,Nanotechnology; Nanotechnology; nanolithography