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dc.contributor.authorLUNNEY, JAMESen
dc.date.accessioned2014-12-18T16:04:04Z
dc.date.available2014-12-18T16:04:04Z
dc.date.issued2013en
dc.date.submitted2013en
dc.identifier.citationDe Posada, E., Moreira, L., Pérez De La Cruz, J., Arronte, M., Ponce, L.V., Flores, T., Lunney, J.G., Oxidation of ZnO thin films during pulsed laser deposition process, Bulletin of Materials Science, 36, 3, 2013, 385-388en
dc.identifier.otherYen
dc.identifier.urihttp://hdl.handle.net/2262/72681
dc.descriptionPUBLISHEDen
dc.description.abstractPulsed laser deposition of ZnO thin films, using KrF laser, is analysed. The films were deposited on (001) sapphire substrates at 400 °C, at two different oxygen pressures (0·3 and 0·4 mbar) and two different target–substrate distances (30 and 40 mm). It is observed that in order to obtain good quality in the photoluminescence of the films, associated with oxygen stoichiometry, it is needed to maximize the time during which the plasma remains in contact with the growing film (plasma residence time), which is achieved by selecting suitable combinations of oxygen pressures and target to substrate distances. It is also discussed that for the growth parameters used, the higher probability for ZnO films growth results from the oxidation of Zn deposited on the substrate and such process takes place during the time that the plasma is in contact with the substrate. Moreover, it is observed that maximizing the plasma residence time over the growing film reduces the rate of material deposition, favouring the surface diffusion of adatoms, which favours both Zn–O reaction and grain growth.en
dc.format.extent385-388en
dc.language.isoenen
dc.relation.ispartofseriesBulletin of Materials Scienceen
dc.relation.ispartofseries36en
dc.relation.ispartofseries3en
dc.rightsYen
dc.subjectAblationen
dc.subjectFilm depositionen
dc.titleOxidation of ZnO thin films during pulsed laser deposition processen
dc.typeJournal Articleen
dc.type.supercollectionscholarly_publicationsen
dc.type.supercollectionrefereed_publicationsen
dc.identifier.peoplefinderurlhttp://people.tcd.ie/jlunneyen
dc.identifier.rssinternalid89701en
dc.identifier.doihttp://dx.doi.org/10.1007/s12034-013-0472-1en
dc.rights.ecaccessrightsopenAccess


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