Browsing Electronic & Electrical Eng by Subject "x-ray diffraction"
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Composition and strain in thin Si1-xGex virtual substrates measured by micro-Raman spectroscopy and X-ray diffraction
(2011)Micro-Raman spectroscopy was employed for the determination of the germanium content, x and strain, , in ultrathin SiGe virtual substrates grown directly on Si by molecular beam epitaxy. The growth of highly relaxed ...