Browsing School of Engineering by Subject "Raman enhancement"
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Raman investigation of different polytypes in SiC thin films grown by solid-gas phase epitaxy on Si (111) and 6H-SiC substrates
(2010)Raman spectroscopy was applied to investigate a series of SiC films grown on Si and 6HSiC substrates by a new method of solid gas phase epitaxy. During the growth characteristic voids are formed in Si at the SiC/Si ...