Fabrication Technology of Heterojunctions in the Lattice of a 2D Photonic Crystal Based on Macroporous Silicon
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Citation:Yu.A. Zharova, G.V. Fedulova, E.B. Astrova, A.V. Baldycheva, V.A. Tolmachev and T.S. Perova,, Fabrication Technology of Heterojunctions in the Lattice of a 2D Photonic Crystal Based on Macroporous Silicon, Semiconductors, 45, 8, 2011, 1103 - 1110
Design and fabrication technology of a microcavity structure based on a double heterojunction in macroporous silicon is suggested. The fabrication process of a strip of a 2D photonic crystal constituted by a finite number of lattice periods and the technique for defect formation by local opening of macropores on the substrate side, followed by filling of these macropores with a nematic liquid crystal, are considered.
Russian Foundation for Basic Research