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dc.contributor.authorHEGNER, MARTIN
dc.date.accessioned2010-04-22T15:57:45Z
dc.date.available2010-04-22T15:57:45Z
dc.date.issued2007
dc.date.submitted2007en
dc.identifier.citationPark, K.K., Lee, H,J.,Yaralioglu, G.G., Ergun, A.S., Oralkan, O., Kupnik, M., Quate, C.F., Khuri-Yakub, B.T., Braun, T., Ramseyer, J.P., Lang, H.P., Hegner, M., Gerber, Ch., Gimzewski, J.K., Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen, Applied Physics Letters, 91, 2007, 094102en
dc.identifier.otherY
dc.identifier.urihttp://hdl.handle.net/2262/39182
dc.descriptionPUBLISHEDen
dc.description.abstractThe authors present the prototype of a chemical sensor using a capacitive micromachined ultrasonic transducer array. Each element in the array consists of a large number of resonating membranes connected in parallel. A five-channel oscillator circuit operates at the resonant frequency around 6 MHz in this prototype. The surface of the elements in the array is coated by polymers such as polyallylamine hydrochloride, polyethylene glycol, and polyvinyl alcohol to detect different chemicals. By measuring shift in oscillation frequencies due to the mass-loading effect, analytes, e.g., water and isopropanol, with concentrations around 20 ppbv parts per 109 by volume range can be detected.en
dc.description.sponsorshipThis work was funded by DARPA, Microsystems Technology Office under Grant No. N66001-06-1-2030.en
dc.format.extent094102en
dc.language.isoenen
dc.relation.ispartofseriesApplied Physics Letters;
dc.relation.ispartofseries91;
dc.rightsYen
dc.subjectPhysics
dc.titleCapacitive micromachined ultrasonic transducers for chemical detection in nitrogenen
dc.typeJournal Articleen
dc.type.supercollectionscholarly_publicationsen
dc.type.supercollectionrefereed_publicationsen
dc.identifier.peoplefinderurlhttp://people.tcd.ie/hegnerm
dc.identifier.rssinternalid64926


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