dc.contributor.author | PEROVA, TANIA | |
dc.date.accessioned | 2009-10-28T15:39:46Z | |
dc.date.available | 2009-10-28T15:39:46Z | |
dc.date.issued | 2009 | |
dc.date.submitted | 2009 | en |
dc.identifier.citation | Joanna Wasyluk, Tatiana S. Perova and Francoise Meyer `Determination of substitutional carbon content in rapid thermal chemical vapour deposited Si1-x-yGexCy on Si (1 0 0) using Raman spectroscopy? in Thin Solid Films, 2009 | en |
dc.identifier.other | Y | |
dc.identifier.other | 62002 | |
dc.identifier.uri | http://hdl.handle.net/2262/34387 | |
dc.description | IN_PRESS | en |
dc.description.abstract | The effect of carbon content on strain compensation in rapid thermal chemical vapour deposited Si1-x-yGexCy films was investigated using Raman spectroscopy as x varies from 10% to 16% and y varies from 0% to 1.8%. The dependence of the Raman intensities of the carbon local modes and the Si-Si modes versus carbon content was analysed. A linear dependence has been revealed for the integrated and peak intensities of these vibrational modes versus C content for samples with x ? 16%. This shows that Raman scattering measurements can be utilised for determination of the substitutional carbon content in SiGeC layers with a Ge content up to 16%. | en |
dc.description.sponsorship | J. Wasyluk acknowledges IRCSET Ireland, Postgraduate Award for the financial support. | en |
dc.format.extent | 104617 bytes | |
dc.format.mimetype | application/pdf | |
dc.language.iso | en | en |
dc.publisher | Elsevier | en |
dc.relation.ispartofseries | Thin Solid Films | en |
dc.rights | Y | en |
dc.subject | Raman spectroscopy; SiGeC layer; stress analysis; substitutional carbon | en |
dc.title | Determination of substitutional carbon content in rapid thermal chemical vapour deposited Si1-x-yGexCy on Si (1 0 0) using Raman spectroscopy | en |
dc.type | Journal Article | en |
dc.type | Journal Article | en |
dc.contributor.sponsor | Irish Research Council for Science Engineering and Technology | |
dc.type.supercollection | scholarly_publications | en |
dc.type.supercollection | refereed_publications | en |
dc.identifier.peoplefinderurl | http://people.tcd.ie/perovat | |
dc.identifier.rssuri | http://dx.doi.org/10.1016/j.tsf.2009.10.076 | |