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MORRIS, MICHAEL (1)
Subject
Aspect ratio (1)
Brushless (1)
Dry etching (1)
Lines and antidots (1)
Pattern transfer; (1)
PS-b-PDMS (1)
Self-assembly (1)
Silicon nanostructures (1)
Soft mask template (1)
Solvo-thermal annealing (1)
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Date Issued
2014 (1)
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Rapid, Brushless Self-assembly of a PS-b-PDMS Block Copolymer for Nanolithography
MORRIS, MICHAEL
(
2014
)