Browsing School of Physics by Subject "elasticity"
Now showing items 1-1 of 1
-
Influence of elastic strains on the mask ratio in glassy polymer nanoimprint
(American Institute of Physics, 2005)During glassy polymer nanoimprint, a supported film is extruded from protruding spunchd to recessed scavityd regions of a patterned stamp. The completeness of this extrusion determines the mask ratio for lithographic ...