Fabrication Technology of Heterojunctions in the Lattice of a 2D Photonic Crystal Based on Macroporous Silicon

Abstract

Design and fabrication technology of a microcavity structure based on a double heterojunction in macroporous silicon is suggested. The fabrication process of a strip of a 2D photonic crystal constituted by a finite number of lattice periods and the technique for defect formation by local opening of macropores on the substrate side, followed by filling of these macropores with a nematic liquid crystal, are considered.