Giovanni Fois, Ciara Therese Bolger, Justin D Holmes and Graham Cross, Novel Pre-oxidation Patterning on Thin Aluminium Film Generating Ordered Nanopores through Anodization, Materials Research Society Proceedings, 1258, 2010
Materials Research Society Proceedings 1258
Anodic Aluminum Oxide (AAO) is widely employed as a template for fabrication of nanowires and nanotubes due to its ability to generate self organized (SO), well ordered pore structures. We have developed a new aluminum pre-patterning technique to create well ordered nanopore arrays on thin films deposited on silicon substrates. We form patterns of thicker oxide on the surface via local oxidation process using a conducting Atomic Force Microscope (AFM) tip working in contact mode. Pores are forced to nucleate between the pre-oxidized regions during the anodization process. The relation between applied voltage and ordered interpore distance has been found to be linear for these supported thin films. However, the pore spacing is highly reduced compared to free standing foils. A new empiric law has been confirmed for a wide range of voltages, solution concentrations and different electrolytes, including oxalic and phosphoric acid. Our results show that pre-oxidation patterning is an alternative technique to achieve an ordered nanoporous template through the anodization process.
Please note: There is a known bug in some browsers that causes an
error when a user tries to view large pdf file within the browser window.
If you receive the message "The file is damaged and could not be
repaired", please try one of the solutions linked below based on the
browser you are using.
Items in TARA are protected by copyright, with all rights reserved, unless otherwise indicated.