Vladimir A. Tolmachev, Vasily A. Melnikov, Ànna V. Baldycheva, Tatiana S. Perova and Galina I. Fedulova, Design, fabrication and optical characterization of Fabry-Pérot tunable resonator based on microstructured Si and liquid crystal, Proceeding of SPIE, 7713, 2010, 771320/1-12
Proceeding of SPIE 7713
The results of a simulation of the optical properties of a silicon Fabry-Pérot resonator (with liquid crystal filler in the
cavity), operated on the shift of the interference bands in the infrared range are presented. The possibility of tuning the
reflection coefficient from 0 to 0.95 (or transmission coefficient from 1 to 0.05) by changing the refractive index by 0.1
in the cavity and using the stop-bands and resonance peaks of high order is demonstrated. The prototype Fabry-Pérot
resonators were fabricated by dry and wet etching of (100)Si and (110)Si. Some of the resonators were fabricated on a
silicon-on-insulator platform. A superposition of transmission peaks with reflection maxima, predicted from calculations,
was confirmed experimentally, using infrared microspectroscopy, with a temperature variation from 20 oC to 65 oC and
an applied electric field from 0V to 10V.
Please note: There is a known bug in some browsers that causes an
error when a user tries to view large pdf file within the browser window.
If you receive the message "The file is damaged and could not be
repaired", please try one of the solutions linked below based on the
browser you are using.
Items in TARA are protected by copyright, with all rights reserved, unless otherwise indicated.