The University of Dublin | Trinity College -- Ollscoil Átha Cliath | Coláiste na Tríonóide
Trinity's Access to Research Archive
Home :: Log In :: Submit :: Alerts ::

TARA >
School of Engineering >
Electronic & Electrical Eng >
Electronic & Electrical Eng (Scholarly Publications) >

Please use this identifier to cite or link to this item: http://hdl.handle.net/2262/41173

Title: Raman and Fourier transform infrared study of substitutional carbon incorporation in rapid thermal chemical vapor deposited Si 1-x-yGexCy on (1 0 0) Si
Author: PEROVA, TATIANA
WASYLUK, JOANNA
Sponsor: Irish Research Council for Science Engineering and Technology
Author's Homepage: http://people.tcd.ie/perovat
http://people.tcd.ie/wasyluj
Keywords: Condensed matter physics
chemical vapour deposition
Issue Date: 2010
Publisher: American Institute of Physics
Citation: Wasyluk, J., Perova, T.S., Meyer, F., Raman and Fourier transform infrared study of substitutional carbon incorporation in rapid thermal chemical vapor deposited Si 1-x-yGexCy on (1 0 0) Si, Journal of Applied Physics, 107, 2, 2010, 023518
Series/Report no.: Journal of Applied Physics;
107;
2;
Abstract: We report on a detailed study of the dependence of the vibrational modes in rapid thermal chemical vapor deposited Si1−x−yGexCy films on the substitutional carbon concentration. Si1−x−yGexCy films were investigated using Raman and infrared spectroscopy with x varying in the range of 10%–16% and y in the range of 0%–1.8%. The introduction of C into thin SiGe layers reduces the average lattice constant. It has been shown that the integrated infrared intensity of the Si–C peak and the ratio of both the Raman integrated and peak intensities of the Si–C peak at 605 cm−1 to the Si–Si peak of SiGeC layer, increase linearly with C content and are independent of the Ge content. This leads to the conclusion that infrared absorption and Raman scattering data can be used to determine the fraction of substitutional carbon content in Si1−x−yGexCy layers with a Ge content of up to 16%. It is also shown that the intensity ratio of the carbon satellite peak to the local carbon mode increases linearly with C content up to a C level of 1.8%. This confirms a conclusion of an increase in the probability of creating third-nearest-neighbor pairs with increasing carbon content, as derived from theoretical calculations
Description: PUBLISHED
URI: http://hdl.handle.net/2262/41173
Related links: http://dx.doi.org/10.1063/1.3284937
Appears in Collections:Electronic & Electrical Eng (Scholarly Publications)

Files in This Item:

File Description SizeFormat
Raman and Fourier.pdfPublished (publisher's copy) - Peer Reviewed188.46 kBAdobe PDFView/Open


This item is protected by original copyright


Please note: There is a known bug in some browsers that causes an error when a user tries to view large pdf file within the browser window. If you receive the message "The file is damaged and could not be repaired", please try one of the solutions linked below based on the browser you are using.

Items in TARA are protected by copyright, with all rights reserved, unless otherwise indicated.

 

Valid XHTML 1.0! DSpace Software Copyright © 2002-2010  Duraspace - Feedback