Browsing by Author "MC GILP, JOHN FINLAY"
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Spectroscopic Investigations of Borosilicate Glass and its Application as a Dopant Source for Shallow Junctions
MOORE, ALAN; PEROVA, TANIA; MC GILP, JOHN FINLAY (Electrochemical Society, 2000)Borosilicate glass was investigated as a dopant source for proximity rapid thermal diffusion. A borosilicate gel was spun onto a silicon wafer and the layer was rapid thermally processed to convert it to a borosilicate ...