Sort by: Order: Results:

Now showing items 1-1 of 1

  • Nanofabrication and electronic transport properties of silicon nanowires 

    VERMA, AKSHARA (Trinity College Dublin. School of Physics. Discipline of Physics, 2019)
    This project develops a robust and reliable process to pattern sub 20 nm features in negative tone Hydrogen Silsesquioxane (HSQ) resist using high-resolution Electron Beam Lithography (EBL) and a low damage reactive ion ...