dc.contributor.author | PEROVA, TATIANA | en |
dc.contributor.author | GOUNKO, IOURI | en |
dc.contributor.editor | T.S. Perova | en |
dc.date.accessioned | 2018-01-31T10:46:29Z | |
dc.date.available | 2018-01-31T10:46:29Z | |
dc.date.created | 7-9 July 2017 | en |
dc.date.issued | 2017 | en |
dc.date.submitted | 2017 | en |
dc.identifier.citation | Sivakumar Balakrishnan, Yurii K Gun?ko, Gerhard F Swiegers and Tatiana S Perova, Investigations Into the Electrochemical Etching Process of P-Type Silicon Using Ethanol-Surfactant Solutions, AIP Conference Proceedings, ICEESM-2017, Lyon, France, 7-9 July 2017, T.S. Perova, 1884, 1, AIP Publisher, 2017, 030007-1 - 030007-5 | en |
dc.identifier.other | Y | en |
dc.identifier.uri | http://hdl.handle.net/2262/82301 | |
dc.description | PUBLISHED | en |
dc.description | Lyon, France | en |
dc.format.extent | 030007-1 | en |
dc.format.extent | 030007-5 | en |
dc.language.iso | en | en |
dc.publisher | AIP Publisher | en |
dc.relation.ispartofseries | 1884 | en |
dc.relation.ispartofseries | 1 | en |
dc.relation.uri | http://aip.scitation.org/toc/apc/1884/1?expanded=1884 | en |
dc.rights | Y | en |
dc.title | Investigations Into the Electrochemical Etching Process of P-Type Silicon Using Ethanol-Surfactant Solutions | en |
dc.title.alternative | AIP Conference Proceedings | en |
dc.title.alternative | ICEESM-2017 | en |
dc.type | Conference Paper | en |
dc.type.supercollection | scholarly_publications | en |
dc.type.supercollection | refereed_publications | en |
dc.identifier.peoplefinderurl | http://people.tcd.ie/perovat | en |
dc.identifier.peoplefinderurl | http://people.tcd.ie/igounko | en |
dc.identifier.rssinternalid | 181912 | en |
dc.rights.ecaccessrights | openAccess | |
dc.relation.cites | Cites | en |
dc.subject.TCDTheme | Nanoscience & Materials | en |
dc.subject.TCDTag | Microengineering, micromachining | en |
dc.identifier.rssuri | http://aip.scitation.org/toc/apc/1884/1?expanded=1884 | en |
dc.identifier.orcid_id | 0000-0002-1017-9847 | en |
dc.status.accessible | N | en |