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dc.contributor.authorPEROVA, TATIANAen
dc.contributor.authorGOUNKO, IOURIen
dc.contributor.editorT.S. Perovaen
dc.date.accessioned2018-01-31T10:46:29Z
dc.date.available2018-01-31T10:46:29Z
dc.date.created7-9 July 2017en
dc.date.issued2017en
dc.date.submitted2017en
dc.identifier.citationSivakumar Balakrishnan, Yurii K Gun?ko, Gerhard F Swiegers and Tatiana S Perova, Investigations Into the Electrochemical Etching Process of P-Type Silicon Using Ethanol-Surfactant Solutions, AIP Conference Proceedings, ICEESM-2017, Lyon, France, 7-9 July 2017, T.S. Perova, 1884, 1, AIP Publisher, 2017, 030007-1 - 030007-5en
dc.identifier.otherYen
dc.identifier.urihttp://hdl.handle.net/2262/82301
dc.descriptionPUBLISHEDen
dc.descriptionLyon, Franceen
dc.format.extent030007-1en
dc.format.extent030007-5en
dc.language.isoenen
dc.publisherAIP Publisheren
dc.relation.ispartofseries1884en
dc.relation.ispartofseries1en
dc.relation.urihttp://aip.scitation.org/toc/apc/1884/1?expanded=1884en
dc.rightsYen
dc.titleInvestigations Into the Electrochemical Etching Process of P-Type Silicon Using Ethanol-Surfactant Solutionsen
dc.title.alternativeAIP Conference Proceedingsen
dc.title.alternativeICEESM-2017en
dc.typeConference Paperen
dc.type.supercollectionscholarly_publicationsen
dc.type.supercollectionrefereed_publicationsen
dc.identifier.peoplefinderurlhttp://people.tcd.ie/perovaten
dc.identifier.peoplefinderurlhttp://people.tcd.ie/igounkoen
dc.identifier.rssinternalid181912en
dc.rights.ecaccessrightsopenAccess
dc.relation.citesCitesen
dc.subject.TCDThemeNanoscience & Materialsen
dc.subject.TCDTagMicroengineering, micromachiningen
dc.identifier.rssurihttp://aip.scitation.org/toc/apc/1884/1?expanded=1884en
dc.identifier.orcid_id0000-0002-1017-9847en
dc.status.accessibleNen


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