Investigations Into the Electrochemical Etching Process of P-Type Silicon Using Ethanol-Surfactant Solutions
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PDFItem Type:
Conference PaperDate:
2017Access:
openAccessCitation:
Sivakumar Balakrishnan, Yurii K Gun?ko, Gerhard F Swiegers and Tatiana S Perova, Investigations Into the Electrochemical Etching Process of P-Type Silicon Using Ethanol-Surfactant Solutions, AIP Conference Proceedings, ICEESM-2017, Lyon, France, 7-9 July 2017, T.S. Perova, 1884, 1, AIP Publisher, 2017, 030007-1 - 030007-5Download Item:
AIP-Proceedings-2017-030007.pdf (PDF) 1.768Mb
Author's Homepage:
http://people.tcd.ie/perovathttp://people.tcd.ie/igounko
Description:
PUBLISHEDLyon, France
Author: PEROVA, TATIANA; GOUNKO, IOURI
Other Titles:
AIP Conference ProceedingsICEESM-2017
Publisher:
AIP PublisherType of material:
Conference PaperSeries/Report no:
18841
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Full text availableSubject (TCD):
Nanoscience & Materials , Microengineering, micromachiningLicences: