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dc.contributor.authorCOLEMAN, JONATHANen
dc.contributor.authorZHANG, HONGZHOUen
dc.contributor.authorDONEGAN, JOHNen
dc.contributor.authorDUESBERG, GEORGen
dc.date.accessioned2014-10-13T12:29:37Z
dc.date.available2014-10-13T12:29:37Z
dc.date.issued2013en
dc.date.submitted2013en
dc.identifier.citationFox, D., Zhou, Y.B., O'Neill, A., Kumar, S., Wang, J.J., Coleman, J.N., Duesberg, G.S., Donegan, J.F., Zhang, H.Z., Helium ion microscopy of graphene: Beam damage, image quality and edge contrast, Nanotechnology, 24, 33, 2013, 335702-en
dc.identifier.otherYen
dc.identifier.urihttp://hdl.handle.net/2262/71477
dc.descriptionPUBLISHEDen
dc.description.abstractA study to analyse beam damage, image quality and edge contrast in the helium ion microscope (HIM) has been undertaken. The sample investigated was graphene. Raman spectroscopy was used to quantify the disorder that can be introduced into the graphene as a function of helium ion dose. The effects of the dose on both freestanding and supported graphene were compared. These doses were then correlated directly to image quality by imaging graphene flakes at high magnification. It was found that a high magnification image with a good signal to noise ratio will introduce very significant sample damage. A safe imaging dose of the order of 10(13) He(+) cm(-2) was established, with both graphene samples becoming highly defective at doses over 5 × 10(14) He(+) cm(-2).The edge contrast of a freestanding graphene flake imaged in the HIM was then compared with the contrast of the same flake observed in a scanning electron microscope and a transmission electron microscope. Very strong edge sensitivity was observed in the HIM. This enhanced edge sensitivity over the other techniques investigated makes the HIM a powerful nanoscale dimensional metrology tool, with the capability of both fabricating and imaging features with sub-nanometre resolution.en
dc.format.extent335702en
dc.language.isoenen
dc.relation.ispartofseriesNanotechnologyen
dc.relation.ispartofseries24en
dc.relation.ispartofseries33en
dc.rightsYen
dc.subjectPhysicsen
dc.titleHelium ion microscopy of graphene: Beam damage, image quality and edge contrasten
dc.typeJournal Articleen
dc.contributor.sponsorScience Foundation Ireland (SFI)en
dc.contributor.sponsorScience Foundation Ireland (SFI)en
dc.contributor.sponsorScience Foundation Ireland (SFI)en
dc.type.supercollectionscholarly_publicationsen
dc.type.supercollectionrefereed_publicationsen
dc.identifier.peoplefinderurlhttp://people.tcd.ie/colemajen
dc.identifier.peoplefinderurlhttp://people.tcd.ie/jdoneganen
dc.identifier.peoplefinderurlhttp://people.tcd.ie/hozhangen
dc.identifier.peoplefinderurlhttp://people.tcd.ie/duesbergen
dc.identifier.rssinternalid89867en
dc.identifier.doihttp://dx.doi.org/10.1088/0957-4484/24/33/335702en
dc.rights.ecaccessrightsopenAccess
dc.contributor.sponsorGrantNumberPI_10/IN.1/I3030en
dc.contributor.sponsorGrantNumber07/SK/I1220aen
dc.contributor.sponsorGrantNumber11/PI/1105en


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