Novel Pre-oxidation Patterning on Thin Aluminium Film Generating Ordered Nanopores through Anodization
Citation:
Giovanni Fois, Ciara Therese Bolger, Justin D Holmes and Graham Cross, Novel Pre-oxidation Patterning on Thin Aluminium Film Generating Ordered Nanopores through Anodization, Materials Research Society Proceedings, 1258, 2010Download Item:

Abstract:
Anodic Aluminum Oxide (AAO) is widely employed as a template for fabrication of nanowires and nanotubes due to its ability to generate self organized (SO), well ordered pore structures. We have developed a new aluminum pre-patterning technique to create well ordered nanopore arrays on thin films deposited on silicon substrates. We form patterns of thicker oxide on the surface via local oxidation process using a conducting Atomic Force Microscope (AFM) tip working in contact mode. Pores are forced to nucleate between the pre-oxidized regions during the anodization process. The relation between applied voltage and ordered interpore distance has been found to be linear for these supported thin films. However, the pore spacing is highly reduced compared to free standing foils. A new empiric law has been confirmed for a wide range of voltages, solution concentrations and different electrolytes, including oxalic and phosphoric acid. Our results show that pre-oxidation patterning is an alternative technique to achieve an ordered nanoporous template through the anodization process.
Sponsor
Grant Number
Science Foundation Ireland
08-CE-I1432
Irish Research Council for Science Engineering and Technology
Higher Education Authority
Author's Homepage:
http://people.tcd.ie/holmesjdhttp://people.tcd.ie/crossg
Description:
PUBLISHED
Author: HOLMES, JUSTIN DEREK; CROSS, GRAHAM
Type of material:
Journal ArticleCollections:
Series/Report no:
Materials Research Society Proceedings1258
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Full text availableKeywords:
Condensed matter physics, Thin filmsLicences: