Show simple item record

dc.contributor.authorPEROVA, TANIAen
dc.contributor.authorWASYLUK, JOANNAen
dc.date.accessioned2010-11-16T18:31:46Z
dc.date.available2010-11-16T18:31:46Z
dc.date.issued2010en
dc.date.submitted2010en
dc.identifier.citationWasyluk, J., Perova, T.S., Meyer, F., Raman and Fourier transform infrared study of substitutional carbon incorporation in rapid thermal chemical vapor deposited Si 1-x-yGexCy on (1 0 0) Si, Journal of Applied Physics, 107, 2, 2010, 023518en
dc.identifier.otherYen
dc.identifier.urihttp://hdl.handle.net/2262/41173
dc.descriptionPUBLISHEDen
dc.description.abstractWe report on a detailed study of the dependence of the vibrational modes in rapid thermal chemical vapor deposited Si1?x?yGexCy films on the substitutional carbon concentration. Si1?x?yGexCy films were investigated using Raman and infrared spectroscopy with x varying in the range of 10%?16% and y in the range of 0%?1.8%. The introduction of C into thin SiGe layers reduces the average lattice constant. It has been shown that the integrated infrared intensity of the Si?C peak and the ratio of both the Raman integrated and peak intensities of the Si?C peak at 605 cm?1 to the Si?Si peak of SiGeC layer, increase linearly with C content and are independent of the Ge content. This leads to the conclusion that infrared absorption and Raman scattering data can be used to determine the fraction of substitutional carbon content in Si1?x?yGexCy layers with a Ge content of up to 16%. It is also shown that the intensity ratio of the carbon satellite peak to the local carbon mode increases linearly with C content up to a C level of 1.8%. This confirms a conclusion of an increase in the probability of creating third-nearest-neighbor pairs with increasing carbon content, as derived from theoretical calculationsen
dc.description.sponsorshipJ.W. acknowledges the financial support of IRCSET Ireland, Postgraduate Award. We also would like to thank Kevin Beranger for help with measurements and data analysis.en
dc.format.extent023518en
dc.language.isoenen
dc.relation.ispartofseriesJournal of Applied Physicsen
dc.relation.ispartofseries107en
dc.relation.ispartofseries2en
dc.rightsYen
dc.subjectCondensed matter physicsen
dc.subjectchemical vapour depositionen
dc.titleRaman and Fourier transform infrared study of substitutional carbon incorporation in rapid thermal chemical vapor deposited Si 1-x-yGexCy on (1 0 0) Sien
dc.typeJournal Articleen
dc.contributor.sponsorIrish Research Council for Science and Engineering Technology (IRCSET)en
dc.type.supercollectionscholarly_publicationsen
dc.type.supercollectionrefereed_publicationsen
dc.identifier.peoplefinderurlhttp://people.tcd.ie/perovaten
dc.identifier.rssinternalid69117en
dc.subject.TCDThemeNanoscience & Materialsen
dc.identifier.rssurihttp://dx.doi.org/10.1063/1.3284937en


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record