Investigation of correlation between characteristics of Raman spectra and parameters of data-scattering obtained from phase coherence theory
Citation:R. A. Moore, S. Unnikrishnan, T. S. Perova, N. D. McMillan, S. Riedel, M. O'Neill, and G. Doyle, Investigation of correlation between characteristics of Raman spectra and parameters of data-scattering obtained from phase coherence theory, Proceedings of SPIE, Opto-Ireland 2005: Optical Sensing and Spectroscopy, Dublin, Ireland, Monday 04 April 2005, Hugh J. Byrne, Elfed Lewis, Brian D. MacCraith, Enda McGlynn, James A. McLaughlin, Gerard D. O'Sullivan, Alan G. Ryder, James E. Walsh, 5826, SPIE, 2005, 379-387
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The importance of sensitive monitoring of changes in Raman spectra in particular for microelectronic applications is discussed here. We explore the practicality of using a data-scattering method to analyse Raman spectra, and to establish the dependence of changes observed in all the spectral function characteristics on the parameters of data-scatter such as scatter closeness and scatter radii using ?Trace Miner? software. In addition to the analysis performed on model data, analysis on experimental Raman data is also discussed. The sensitivity of the approach is fully appreciated.
Higher Education Authority
Type of material:Poster
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