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dc.contributor.authorPEROVA, TANIA
dc.contributor.authorMOORE, ALAN
dc.date.accessioned2010-02-01T12:49:46Z
dc.date.available2010-02-01T12:49:46Z
dc.date.created16-19 Mayen
dc.date.issued2004
dc.date.submitted2004en
dc.identifier.citationS. Chakraborty, S.K. Samanta, S. Bhattacharya, J. McCarthy, B.M. Armstrong, H.S. Gamble, G.K. Dalapati, S. Das, T. Perova, R.A. Moore and C.K. Maiti `Electrical Properties of High-k Ta205 Gate Dielectrics on Strained Ge-rich Layers? in proceedings of the IEEE 24th International Conference on Microelectronics (MIEL-2004), NIS, Serbia and Montenegro, 16-19 May, 24, (2), 2004, pp 405 - 407en
dc.identifier.otherY
dc.identifier.urihttp://hdl.handle.net/2262/36648
dc.descriptionPUBLISHEDen
dc.description.abstractThe electrical properties of ultrathin high-k Zr02 gate dielectric films dcposited on strained Gc-rich layers using microwave plasma enhanced chemical vapor deposition (PECVD) technique at a low temperature (150'C) have been studied. The strained Ge-rich heterolaycrs have been analyzed by transmission elcctron microscopy (TEM) and Raman spectra. X-ray photoclectron spectroscopy (XPS) has been used for analysis of chemical compositions of the deposited 2102 films. The fixed oxide charge density (Qdq) and interface state density (D;,) are found to be 4.8 x 10" cm~ 2an d 5 . 1 ~ 1 0 e' ~V -'mi2, respectively. The capacitance-voltage (C-V) characteristics and current-voltage (I-V) characteristics before and after constant current stressing exhibit good electrical properties and thus indicate the suitability of these films for future microelectronic applications.en
dc.format.extent405 - 407en
dc.format.extent234504 bytes
dc.format.mimetypeapplication/pdf
dc.language.isoenen
dc.publisherIEEEen
dc.relation.ispartofseries24en
dc.relation.ispartofseries2en
dc.rightsYen
dc.subjectMechanical and Manufacturing Engineering
dc.titleElectrical Properties of High-k Ta205 Gate Dielectrics on Strained Ge-rich Layersen
dc.typeConference Paperen
dc.type.supercollectionscholarly_publicationsen
dc.type.supercollectionrefereed_publicationsen
dc.identifier.peoplefinderurlhttp://people.tcd.ie/rmoore
dc.identifier.peoplefinderurlhttp://people.tcd.ie/perovat
dc.identifier.rssinternalid14143
dc.identifier.rssurihttp://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=1314652&isnumber=29143en


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