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dc.contributor.authorCROSS, GRAHAM
dc.date.accessioned2009-03-10T16:20:23Z
dc.date.available2009-03-10T16:20:23Z
dc.date.issued2002
dc.date.submitted2002en
dc.identifier.citationKing, W.P., Kenny, T.W., Goodson, K.E., Cross, G.L.W., Despont, M., Durig, U.T., Rothuizen, H. Binnig, G., and Vettiger, P. `Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation? in Journal of Microelectromechanical Systems, 11, (6), 2002, pp 765-774en
dc.identifier.otherY
dc.identifier.otherYen
dc.identifier.urihttp://hdl.handle.net/2262/28147
dc.descriptionPUBLISHEDen
dc.description.abstractIn thermomechanical data writing, a resistively-heated atomic force microscope (AFM) cantilever tip forms indentations in a thin polymer film. The same cantilever operates as a thermal proximity sensor to detect the presence of previously written data bits. This paper uses recent progress in thermal analysis of the writing and reading modes to develop new cantilever designs for increased speed, sensitivity, and reduced power consumption in both writing and reading operation. Measurements of cantilever electrical resistance during heating reveals physical limits of cantilever writing and reading, and verifies a finite-difference thermal and electrical simulation of cantilever operation. This work proposes two new cantilever designs that correspond to fabrication technology benchmarks. Simulations predict that the proposed cantilevers have a higher data rate and are more sensitive than the present cantilever. The various cantilever designs offer single-bit writing times of 0.2 ?s-25 ?s for driving voltages of 2-25 V. The thermal reading ?R/R sensitivity is as high as 4?10-4 per vertical nm in near steady-state operation.en
dc.description.sponsorshipThe authors gratefully acknowledge helpful discussions with and generous support from P. G. Sverdrup of Intel Corp. C. F. Quate of Stanford University, and P. F. Seidler and the Micro and NanoMechanics group of the IBM Zurich Research Laboratory.en
dc.format.extent765-774en
dc.format.extent366 bytes
dc.format.mimetypeapplication/pdf
dc.language.isoenen
dc.publisherIEEEen
dc.relation.ispartofseriesJournal of Microelectromechanical Systemsen
dc.relation.ispartofseries11en
dc.relation.ispartofseries6en
dc.rightsYen
dc.subjectPhysicsen
dc.titleDesign of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operationen
dc.typeJournal Articleen
dc.type.supercollectionscholarly_publicationsen
dc.type.supercollectionrefereed_publicationsen
dc.identifier.peoplefinderurlhttp://people.tcd.ie/crossg
dc.identifier.rssurihttp://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=1097797&isnumber=24074


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