Asymmetric Fabry-Perot device arrays with low insertion loss and high uniformity

Abstract

We report on arrays of normally ON asymmetric Fabry-Perot modulator (AFPM) devices which exhibit a high degree of uniformity between devices, with a thickness variation across an array of 0.07%. The devices in one array have a mean insertion loss of 1.8 dB, and OFF reflectivities of less than 3%, giving a mean contrast ratio of 22:l. These characteristics are measured at a single operating wavelength of 857 nm. The spatial light modulators show promise for the use of AFPM devices in optical processing