Browsing Physics (Theses and Dissertations) by Sponsor "Intel"
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Comparative study of beam-induced carbonaceous deposits in helium-ion and scanning electron microscopes. (Trinity College Dublin. School of Physics. Discipline of Physics, 2018)In this work, the phenomena of beam-induced contamination in charged beam microscopes (i.e. the scanning electron microscope (SEM) and helium ion microscope (HIM)) was investigated in order to determine its influence on ...